@article{MeschederMajer1997,
  author    = {Ulrich Mescheder and S. Majer},
  title     = {Micromechanical inclinometer},
  series   = {Sensors and Actuators A: Physical},
  volume    = {60.1997},
  number    = {1-3},
  issn      = {0924-4247},
  doi       = {10.1016/S0924-4247(97)01387-3},
  pages     = {134 -- 138},
  year      = {1997},
  language  = {en}
}