@article{MeschederMajer1997, author = {Mescheder, Ulrich and Majer, S.}, title = {Micromechanical inclinometer}, journal = {Sensors and Actuators A: Physical}, volume = {60.1997}, number = {1-3}, issn = {0924-4247}, doi = {10.1016/S0924-4247(97)01387-3}, pages = {134 -- 138}, year = {1997}, language = {en} }