TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Mescheder, Ulrich
A1  - Kötter, Christiane
T1  - Optical monitoring and control of Si wet etching
T2  - Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998
Y1  - 1998
SN  - 0-7503-0536-3
SB  - 0-7503-0536-3
SP  - 51
EP  - 54
PB  - Inst. of Physics Publ.
CY  - Bristol
ER  -