@article{MeschederK{\"o}tter1999,
  author    = {Mescheder, Ulrich and K{\"o}tter, Christiane},
  title     = {Optical monitoring and control of Si wet etching},
  journal   = {Sensors and Actuators A: Physical},
  volume    = {76.1999},
  number    = {1-3},
  issn      = {0924-4247},
  doi       = {10.1016/S0924-4247(99)00212-5},
  pages     = {425 -- 430},
  year      = {1999},
  language  = {en}
}