TY - CHAP U1 - Konferenzveröffentlichung A1 - Kovacs, Andras A1 - Mescheder, Ulrich T1 - Surface Micromachining Process for C-Si as Active Material T2 - Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany KW - Surface micromachining KW - Porous silicon KW - Sacrificial layer Y1 - 2001 SN - 978-3-540-42150-4 SB - 978-3-540-42150-4 SP - 620 EP - 623 PB - Springer CY - Berlin ER -