TY - CPAPER U1 - Konferenzveröffentlichung A1 - Freudenreich, Markus A1 - Mescheder, Ulrich A1 - Somogyi, Gergoe T1 - Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch T2 - Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2 Y1 - 2003 SN - 0-7803-7731-1 SB - 0-7803-7731-1 SP - 1096 EP - 1099 PB - IEEE ER -