TY - CPAPER U1 - Konferenzveröffentlichung A1 - Mescheder, Ulrich T1 - Nanoporous Silicon: Multifunctional Material for Microsystems T2 - Novel vehicle concepts and emerging vehicle technologies : papers presented at the RTO Applied Vehicle Technology Panel (AVT) symposium held in Brussels, Belgium, 7 - 10 April 2003 KW - CD-ROM Y1 - 2004 ER -