@inproceedings{Mescheder2004, author = {Mescheder, Ulrich}, title = {Nanoporous Silicon: Multifunctional Material for Microsystems}, booktitle = {Novel vehicle concepts and emerging vehicle technologies : papers presented at the RTO Applied Vehicle Technology Panel (AVT) symposium held in Brussels, Belgium, 7 - 10 April 2003}, year = {2004}, language = {en} }