@inproceedings{HerdingSomogyiMeschederetal.2004, author = {Mark Herding and Gergoe Somogyi and Ulrich Mescheder and Peter Woias}, title = {A new micromachined optical fiber switch for instrumentation purposes}, series = {Proceedings of SPIE: Volume 5455; MEMS, MOEMS, and Micromachining, Photonics Europe, 26-30 April 2004, Strasbourg, France}, isbn = {0-8194-5378-1}, year = {2004}, language = {en} }