TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Freudenreich, Markus A1 - Mescheder, Ulrich A1 - Somogyi, Gergoe T1 - Simulation and realization of a novel micromechanical bi-stable switch JF - Sensors and Actuators A: Physical KW - Bi-stability KW - Micromechanical switch KW - SOI-technology KW - FEM-simulation KW - Fibre switch Y1 - 2004 SN - 0924-4247 SS - 0924-4247 U6 - https://doi.org/10.1016/j.sna.2004.01.034 DO - https://doi.org/10.1016/j.sna.2004.01.034 VL - 114.2004 IS - 2-3 SP - 451 EP - 459 ER -