@article{MeschederSomogyiFreudenreichetal.2005, author = {Mescheder, Ulrich and Somogyi, Gergoe and Freudenreich, Markus and Estan, Carlos}, title = {Mikrotechnisch hergestellter Membranspiegel f{\"u}r aktive Fokussierung}, journal = {Horizonte}, number = {27}, issn = {1432-9174}, pages = {16 -- 20}, year = {2005}, language = {de} }