@inproceedings{KovacsVizvaryKovacsetal.2006, author = {Kovacs, Adam and Vizvary, Zsolt and Kovacs, Andras and Mescheder, Ulrich}, title = {Large Defection Analysis of Perforated Silicon Nitride Membranes}, booktitle = {6th European Solid Mechanics Conference: ESMC 2006; 28 August - 1 September, 2006 Budapest, Hungary}, pages = {3}, year = {2006}, language = {en} }