TY  - CPAPER
U1  - Konferenzveröffentlichung
A1  - Mescheder, Ulrich
A1  - Torok, Zoltan
A1  - Kronast, Wolfgang
T1  - Active focusing device based on MOEMS technology
T2  - Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France
Y1  - 2006
SN  - 978-0-8194-6242-8
SB  - 978-0-8194-6242-8
SP  - 12
S1  - 12
ER  -