@inproceedings{MeschederTorokKronast2006,
  author    = {Mescheder, Ulrich and Torok, Zoltan and Kronast, Wolfgang},
  title     = {Active focusing device based on MOEMS technology},
  booktitle = {Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France},
  isbn      = {978-0-8194-6242-8},
  pages     = {12},
  year      = {2006},
  language  = {en}
}