@inproceedings{MeschederTorokKronast2006, author = {Ulrich Mescheder and Zoltan Torok and Wolfgang Kronast}, title = {Active focusing device based on MOEMS technology}, series = {Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France}, isbn = {978-0-8194-6242-8}, year = {2006}, language = {en} }