@inproceedings{KeshavarziMeschederReineckeetal.2012, author = {Keshavarzi, Shervin and Mescheder, Ulrich and Reinecke, Holger and Kovacs, Andras}, title = {Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration}, booktitle = {23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany}, year = {2012}, language = {en} }