@article{IvanovMeschederWoias2014,
  author    = {Ivanov, Alexey and Mescheder, Ulrich and Woias, Peter},
  title     = {Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process},
  journal   = {ECS Transactions},
  volume    = {58.2014},
  number    = {46},
  issn      = {1938-6737},
  url       = {http://ma.ecsdl.org/content/MA2013-02/42/2463.full.pdf+html},
  pages     = {15 -- 24},
  year      = {2014},
  language  = {en}
}