@article{IvanovMeschederWoias,
  author    = {Alexey Ivanov and Ulrich Mescheder and Peter Woias},
  title     = {Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process},
  series = {ECS Transactions},
  volume    = {58.2014},
  number    = {46},
  issn      = {1938-6737},
  pages     = {15 -- 24},
  language  = {en}
}