TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Kronast, Wolfgang A1 - Mescheder, Ulrich A1 - Müller, Bernhard A1 - Huster, Rolf T1 - Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology JF - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 SS - 1932-5134 U6 - https://doi.org/10.1117/1.JMM.13.1.011112 DO - https://doi.org/10.1117/1.JMM.13.1.011112 VL - 13.2014 IS - 1 ER -