@article{KronastMeschederM{\"u}lleretal.2014,
  author    = {Kronast, Wolfgang and Mescheder, Ulrich and M{\"u}ller, Bernhard and Huster, Rolf},
  title     = {Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology},
  journal   = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  volume    = {13.2014},
  number    = {1},
  issn      = {1932-5134},
  doi       = {10.1117/1.JMM.13.1.011112},
  year      = {2014},
  language  = {en}
}