@inproceedings{MuthiahKhaziMescheder2017,
  author    = {Muthiah, Uma and Khazi, Isman M. and Mescheder, Ulrich},
  title     = {3D Strukturierung von Silizium mittels Grauwert-Technologie},
  booktitle = {MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. - 25. Oktober 2017 in M{\"u}nchen},
  isbn      = {978-3-8007-4491-6},
  pages     = {692 -- 695},
  year      = {2017},
  language  = {de}
}