TY - CHAP U1 - Konferenzveröffentlichung A1 - Kunz, Th. A1 - Krippner, P. A1 - Fath, Andreas A1 - Scherr, M. A1 - Mohr, J. T1 - Electromagnetic microactuators for optical applications T2 - Actuator 2000, 7th International Conference on New Actuators & International Exhibition on Smart Actuators and Drive Systems : 19 - 21 June 2000, Bremen, Germany Y1 - 2000 SN - 978-3-933339-02-7 SB - 978-3-933339-02-7 SP - 355 EP - 358 ER -