@incollection{Bucher2010,
  author    = {Volker Bucher},
  title     = {Plasmaunterst{\"u}tzte chemische Dampfphasenabscheidung},
  series = {Vakuum, Plasma, Technologien Teil I},
  editor    = {Gerhard Blasek and G{\"u}nter Br{\"a}uer},
  publisher = {Leuze},
  address   = {Bad Saulgau},
  isbn      = {978-3-87480-257-4},
  pages     = {322 -- 355},
  year      = {2010},
  language  = {de}
}