TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Bauerdick, S.
A1  - Burkhardt, Claus J.
A1  - Rudorf, R.
A1  - Barth, W.
A1  - Bucher, Volker
A1  - Nisch, Wilfried
T1  - In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope
JF  - Microelectronic Engineering
KW  - Electron beam induced deposition
KW  - Micro manipulator
KW  - Local gas injection
KW  - Atomic force microscope
KW  - In-situ monitoring
Y1  - 2003
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/S0167-9317(03)00160-6
DO  - https://doi.org/10.1016/S0167-9317(03)00160-6
VL  - 67/68.2003
IS  - June
SP  - 963
EP  - 969
ER  -