TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Albers, Albert A1 - Enkler, Hans-Georg A1 - Leslabay, Pablo T1 - On the simulation of molded micro components and systems BT - High Aspect Ratio Micro Structure Technology Workshop, HARMST '07, Besançon, France, 7-9 June 2007 JF - Microsystem Technologies Y1 - 2008 SN - 1432-1858 SS - 1432-1858 U6 - https://doi.org/10.1007/s00542-007-0522-y DO - https://doi.org/10.1007/s00542-007-0522-y VL - 14.2008 IS - 9-11 SP - 1269 EP - 1277 ER -