TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Albers, Albert A1 - Börsting, Peter A1 - Deigendesch, Tobias A1 - Enkler, Hans-Georg A1 - Leslabay, Pablo T1 - Micro gear validation: improving the correlation between virtual and physical testing BT - 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009, June 25 to 28, Saskatoon, Saskatechwan, Canada JF - Microsystem Technologies Y1 - 2010 SN - 1432-1858 SS - 1432-1858 U6 - https://doi.org/10.1007/s00542-009-0997-9 DO - https://doi.org/10.1007/s00542-009-0997-9 VL - 16.2010 IS - 8 SP - 1529 EP - 1535 ER -