@article{LyubimovVolginMeschederetal.2016,
  author    = {Victor V. Lyubimov and Vladimir M. Volgin and Ulrich Mescheder and Inna V. Gnidina and Alexey Ivanov},
  title     = {Investigation of plastic electrode tools for electrochemical machining of silicon},
  series   = {Precision Engineering},
  volume    = {47.2016},
  issn      = {1873-2372},
  doi       = {10.1016/j.precisioneng.2016.09.017},
  pages     = {546 -- 556},
  year      = {2016},
  language  = {en}
}