@article{LyubimovVolginMeschederetal.2016,
  author    = {Lyubimov, Victor V. and Volgin, Vladimir M. and Mescheder, Ulrich and Gnidina, Inna V. and Ivanov, Alexey},
  title     = {Investigation of plastic electrode tools for electrochemical machining of silicon},
  journal   = {Precision Engineering},
  volume    = {47.2016},
  issn      = {1873-2372},
  doi       = {10.1016/j.precisioneng.2016.09.017},
  pages     = {546 -- 556},
  year      = {2016},
  language  = {en}
}