@article{KeshavarziMeschederReinecke2016,
  author    = {Shervin Keshavarzi and Ulrich Mescheder and Holger Reinecke},
  title     = {Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces},
  series   = {Journal of Microelectromechanical Systems},
  volume    = {25.2016},
  number    = {2},
  issn      = {1941-0158},
  doi       = {10.1109/JMEMS.2016.2519823},
  pages     = {371 -- 379},
  year      = {2016},
  language  = {en}
}