@incollection{IvanovMescheder2016,
  author    = {Alexey Ivanov and Ulrich Mescheder},
  title     = {Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices},
  series = {Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three},
  editor    = {Ghenadii Korotcenkov},
  publisher = {CRC Press},
  address   = {Boca Raton},
  isbn      = {978-1-4822-6458-6},
  pages     = {129 -- 141},
  year      = {2016},
  language  = {en}
}