@inproceedings{LimaReineckeMescheder2015, author = {Lima, Frederico and Reinecke, Holger and Mescheder, Ulrich}, title = {Adhesion of Continuous and Homogeneous Electrodeposited Copper Layers on Silicon}, booktitle = {MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe}, isbn = {978-3-8007-4100-7}, pages = {409 -- 412}, year = {2015}, language = {en} }