@inproceedings{KeshavarziMeschederReinecke2015,
  author    = {Keshavarzi, Shervin and Mescheder, Ulrich and Reinecke, Holger},
  title     = {Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique},
  booktitle = {28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015},
  isbn      = {978-1-4799-7955-4},
  doi       = {10.1109/MEMSYS.2015.7050977},
  pages     = {413 -- 416},
  year      = {2015},
  language  = {en}
}