@article{KasteFilbertMeschederetal.2014, author = {Kaste, Nigol and Filbert, Alexander and Mescheder, Ulrich and Rang, Toomas and Rang, Galina}, title = {Process Development For 3D Laser Lithography}, journal = {WIT Transactions on The Built Environment}, volume = {137.2014}, issn = {1743-3509}, doi = {10.2495/HPSM140131}, pages = {139 -- 150}, year = {2014}, language = {en} }