@article{MeschederKhazi2015,
  author    = {Ulrich Mescheder and Isman M. Khazi},
  title     = {Corner rounding of sharp silicon punching tool edges by local oxidation of silicon},
  series   = {Microelectronic Engineering},
  volume    = {141.2015},
  number    = {2},
  issn      = {0167-9317},
  doi       = {10.1016/j.mee.2015.02.033},
  pages     = {178 -- 183},
  year      = {2015},
  language  = {en}
}