@article{PasslackSimonBucheretal.2023, author = {Ulrike Passlack and Nicolai Simon and Volker Bucher and Christine Harendt and Thomas Stieglitz and Joachim N. Burghartz}, title = {Flexible Ultrathin Chip-Film Patch for Electronic Component Integration and Encapsulation using Atomic Layer-Deposited Al2O3–TiO2 Nanolaminates}, series = {ACS Applied Materials \& Interfaces}, volume = {15.2023}, number = {12}, issn = {1944-8252}, doi = {10.1021/acsami.2c22513}, pages = {16221 -- 16231}, year = {2023}, language = {en} }