TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mescheder, Ulrich
A1  - Lootze, Michael
A1  - Aljasem, Khaled
T1  - Evaluation and Optimization of a MOEMS Active Focusing Device
JF  - Micromachines
KW  - Adaptive optics
KW  - MOEMS
KW  - SOI
KW  - Electrostatic actuation
KW  - Active focusing
Y1  - 2021
SN  - 2072-666X
SS  - 2072-666X
U6  - https://doi.org/10.3390/mi12020172
DO  - https://doi.org/10.3390/mi12020172
VL  - 12.2021
IS  - 2
SP  - 22
S1  - 22
ER  -