@inproceedings{MeschederKovacsKronastetal.2001,
  author    = {Ulrich Mescheder and Andras Kovacs and Wolfgang Kronast and Istvan Barsony and Maria Adam and Cs. D{\"u}cs{\"o}},
  title     = {Porous silicon as multifunctional material in MEMS},
  series = {Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii},
  isbn      = {0-7803-7215-8},
  doi       = {10.1109/NANO.2001.966471},
  pages     = {483 -- 488},
  year      = {2001},
  language  = {en}
}