TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Bucher, Volker
A1  - Graf, Michael
A1  - Stelzle, Martin
A1  - Nisch, Wilfried
T1  - Low-impedance thin-film polycrystalline silicon microelectrodes for extracellular stimulation and recording
JF  - Biosensors and Bioelectronics
KW  - Impedance spectroscopy
KW  - Micro electrode arrays
KW  - Polycrystalline silicon
KW  - Porous silicon
KW  - Thin-film microelectrodes
Y1  - 1999
SN  - 0956-5663
SS  - 0956-5663
U6  - https://doi.org/10.1016/S0956-5663(99)00037-8
DO  - https://doi.org/10.1016/S0956-5663(99)00037-8
VL  - 14.1999
IS  - 7
SP  - 639
EP  - 649
ER  -