TY  - RPRT
U1  - Forschungsbericht
A1  - Mescheder, Ulrich
A1  - Kötter, Christiane
A1  - Katzenstein, B.
A1  - Lang, T.
T1  - Piezoelectric inch worm motor with monolithically integrated driving block
T2  - Forschungsbericht
KW  - Piezoelectric stepping motor
KW  - Inch worm
KW  - Piezoelectric actuator
KW  - piezoelektrischer Schrittmotor
Y2  - 1998
SP  - 25
EP  - 28
ER  -