TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Kaste, Nigol
A1  - Filbert, Alexander
A1  - Mescheder, Ulrich
A1  - Rang, Toomas
A1  - Rang, Galina
T1  - Process Development For 3D Laser Lithography
JF  - WIT Transactions on The Built Environment
KW  - MEMS
KW  - Greyscale
KW  - Direct laser writing
KW  - 3D photolithography
KW  - Tactile sensor
KW  - Medical application
Y1  - 2014
UN  - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-10047
SN  - 1743-3509
SS  - 1743-3509
U6  - https://doi.org/10.2495/HPSM140131
DO  - https://doi.org/10.2495/HPSM140131
VL  - 137.2014
SP  - 139
EP  - 150
ER  -