@article{KeshavarziMeschederReinecke2017,
  author    = {Shervin Keshavarzi and Ulrich Mescheder and Holger Reinecke},
  title     = {Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces},
  series   = {Journal of Microelectromechanical Systems},
  volume    = {26.2017},
  number    = {2},
  issn      = {1057-7157},
  doi       = {10.1109/JMEMS.2016.2646759},
  pages     = {385 -- 395},
  year      = {2017},
  language  = {en}
}