@inproceedings{KeshavarziMeschederReinecke2014, author = {Shervin Keshavarzi and Ulrich Mescheder and Holger Reinecke}, title = {Characterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon}, series = {MEMS 2014: The 27th IEEE International Conference on Micro Electro Mechanical Systems, January 26-30, 2014, San Francisco}, isbn = {978-1-4799-3509-3}, doi = {10.1109/MEMSYS.2014.6765842}, pages = {1119 -- 1122}, year = {2014}, language = {en} }