@inproceedings{KeshavarziMeschederReinecke2015, author = {Shervin Keshavarzi and Ulrich Mescheder and Holger Reinecke}, title = {Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique}, series = {28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015}, isbn = {978-1-4799-7955-4}, doi = {10.1109/MEMSYS.2015.7050977}, pages = {413 -- 416}, year = {2015}, language = {en} }