TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Keshavarzi, Shervin
A1  - Mescheder, Ulrich
A1  - Reinecke, Holger
T1  - Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces
JF  - Journal of Microelectromechanical Systems
KW  - Porous silicon
KW  - Si-Si direct bonding
KW  - Adhesion
KW  - Capillary forces
Y1  - 2017
SN  - 1057-7157
SS  - 1057-7157
U6  - https://doi.org/10.1109/JMEMS.2016.2646759
DO  - https://doi.org/10.1109/JMEMS.2016.2646759
VL  - 26.2017
IS  - 2
SP  - 385
EP  - 395
ER  -