@article{KadivarShamraySoltanietal.2019,
  author    = {Mohammadali Kadivar and Sergey Shamray and Babak Soltani and Amir Daneshi and Bahman Azarhoushang},
  title     = {Laser-assisted micro-grinding of Si3N4},
  series   = {Precision Engineering},
  volume    = {60.2019},
  issn      = {0141-6359},
  doi       = {10.1016/j.precisioneng.2019.09.004},
  pages     = {394 -- 404},
  year      = {2019},
  language  = {en}
}