@article{BadeFathLeskopf, author = {Klaus Bade and Andreas Fath and Werner Leskopf}, title = {Galvanische Prozesse in der Mikrosystemtechnik: Effekte, Kontrolle und Steuerung}, series = {Metalloberfl{\"a}che: MO}, volume = {53.1999}, number = {9}, issn = {0026-0797}, pages = {34 -- 38}, language = {de} }