TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Kritwattanakhorn, Jutaphorn A1 - Bauersfeld, Marie-Luise A1 - Kovacs, Andras A1 - Müller, Bernhard A1 - Mescheder, Ulrich A1 - Rademacher, Sven A1 - Wöllenstein, Jürgen T1 - Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems JF - Sensors and Actuators B: Chemical KW - Platinum KW - Adhesion and diffusion barrier KW - Electrochemical etching process KW - Porous silicon KW - Multifunctional sensor systems Y1 - 2007 SN - 0925-4005 SS - 0925-4005 U6 - https://doi.org/10.1016/j.snb.2007.07.024 DO - https://doi.org/10.1016/j.snb.2007.07.024 VL - 127.2007 IS - 1 SP - 126 EP - 131 ER -