TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Keshavarzi, Shervin
A1  - Mescheder, Ulrich
A1  - Reinecke, Holger
T1  - Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces
JF  - Journal of Microelectromechanical Systems
KW  - Porous silicon
KW  - Velcro principle
KW  - Direct bonding
KW  - van der Waals force
Y1  - 2016
SN  - 1941-0158
SS  - 1941-0158
U6  - https://doi.org/10.1109/JMEMS.2016.2519823
DO  - https://doi.org/10.1109/JMEMS.2016.2519823
VL  - 25.2016
IS  - 2
SP  - 371
EP  - 379
ER  -