TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Keshavarzi, Shervin A1 - Mescheder, Ulrich A1 - Reinecke, Holger T1 - Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces JF - Journal of Microelectromechanical Systems KW - Porous silicon KW - Si-Si direct bonding KW - Adhesion KW - Capillary forces Y1 - 2017 SN - 1057-7157 SS - 1057-7157 U6 - https://doi.org/10.1109/JMEMS.2016.2646759 DO - https://doi.org/10.1109/JMEMS.2016.2646759 VL - 26.2017 IS - 2 SP - 385 EP - 395 ER -