@inproceedings{MeschederBauersfeldKovacsetal.2007, author = {Ulrich Mescheder and Marie-Luise Bauersfeld and Andras Kovacs and Jutaphorn Kritwattanakhorn and Bernhard M{\"u}ller and Andreas Peter and Christoph Ament and Sven Rademacher and J{\"u}rgen W{\"o}llenstein}, title = {MEMS-Based Air Quality Sensor}, series = {Transducers '07 Eurosensors XXI : digest of technical papers ; the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France}, isbn = {1-4244-0841-5}, issn = {2159-547X}, doi = {10.1109/SENSOR.2007.4300409}, pages = {1417 -- 1420}, year = {2007}, language = {en} }