TY - CHAP U1 - Konferenzveröffentlichung A1 - Mescheder, Ulrich A1 - Bauersfeld, Marie-Luise A1 - Kovacs, Andras A1 - Kritwattanakhorn, Jutaphorn A1 - Müller, Bernhard A1 - Peter, Andreas A1 - Ament, Christoph A1 - Rademacher, Sven A1 - Wöllenstein, Jürgen T1 - MEMS-Based Air Quality Sensor T2 - Transducers '07 Eurosensors XXI : digest of technical papers ; the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France Y1 - 2007 SN - 2159-547X SS - 2159-547X SN - 1-4244-0841-5 SB - 1-4244-0841-5 U6 - https://doi.org/10.1109/SENSOR.2007.4300409 DO - https://doi.org/10.1109/SENSOR.2007.4300409 SP - 1417 EP - 1420 S1 - 4 ER -