@inproceedings{KronastMeschederMuelleretal.2010, author = {Wolfgang Kronast and Ulrich Mescheder and Bernhard M{\"u}ller and Antwi Nimo and Claus Braxmaier and Thilo Schuldt}, title = {Development of a tilt actuated micromirror for applications in laser interferometry}, series = {Proceedings of SPIE: Volume 7594; SPIE MOEMS-MEMS, 2010, San Francisco, California, United States}, isbn = {978-0-8194-7990-7}, doi = {10.1117/12.859648}, year = {2010}, language = {de} }