TY - CHAP U1 - Konferenzveröffentlichung A1 - Saad, Awad A1 - Mescheder, Ulrich A1 - Müller, Bernhard A1 - Nimo, Antwi T1 - High eficient, low cost electret charging set-up for mems based energy harvesting systems T2 - Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium KW - Electrostatic vibration energy harvester KW - Electrets charging KW - Charge stability Y1 - 2010 SP - 61 EP - 64 ER -