TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Mescheder, Ulrich A1 - Nimo, Antwi A1 - Müller, Bernhard A1 - Abou Elkeir, Awad S. T1 - Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy JF - Microsystem Technologies Y1 - 2012 SN - 0946-7076 SS - 0946-7076 U6 - https://doi.org/10.1007/s00542-011-1418-4 DO - https://doi.org/10.1007/s00542-011-1418-4 VL - 18.2012 IS - 7-8 SP - 931 EP - 943 ER -